Si-PIC光回路検査及び組立装置

Si-PIC光回路検査及び組立装置


MEMS OSW MEMS OXC MEMS VOA Si-PIC光回路設計ツール Si-PIC光回路検査及び組立装置 高速光通信用部品 高速光計測装置 特殊ファイバ ファイバプリフォーム
Photonic automated optical inspection (AOI) system

Photonic automated optical inspection (AOI) system

The automated optical inspection  system consists of a multi-angle visual inspection system ,a high-performance vibration isolation system, and an automatic wafer loading and unloading system.Utilizing advanced machine learning algorithms,the system enables high-precision detection and early warning of defects such as stains,  scratches, bumps, fractures, discoloration, and dimensional errors. The system’s minimum detectable defect reaches 0.5μm, supporting 6 sigma Si and 4 sigma Sip process flow.

Wide range of applications

  • Silicon photonics, TFLN, III-V etc.

High accuracy and repeatability

  • Machine learning algorithms

  • Minimum detectable defect 0.5μm

Automated test

  • Automatic loading and unloading of DUT

  • Automatic focus and layered focus image capture

Flexibility

  • Wafer (2 ~ 12 inch) and die level AOI

  • Multi carrier form including Blue Tape/Gel-Pak/Waffle Pack

  • Compatible with unpatterned wafer and patterned wafer

  • Integrated bright field (BF), dark field (DF) and differential interference contrast (DIC)

  • Detectable defects includes contamination, scratch, bump, break, discoloration, and dimensional error

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